The Loading Effect of the Electroplating
碩士 === 逢甲大學 === 自動控制工程所 === 97 === Micro Electro Mechanical Systems is one of the most development systems in recent years. With a mature semiconductor technology can be developed many micro-actuators and sensors The technology of micro-electroplating has wildly used in MEMS and IC packaging. Becaus...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45958008015946644047 |