MEMS－Based Pressure Sensors
碩士 === 大葉大學 === 機械與自動化工程學系 === 97 === This study presents a novel fabrication process for a micro pressure sensor. The presented micro sensor not only has a smaller volume than a traditional sensor, but also can make more accurate measurement and higher sensitivity due to the miniaturized dimension....
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48032316203546398843 |