The Synthesis of Carbon Nanotubes on Silicon Nanowires by Thermal Chemical Vapor Deposition
碩士 === 大葉大學 === 電機工程學系 === 97 === In this work, thermal chemical vapor deposition was utilized to grow carbon nanotubes (CNTs) on Si nanowires. CH4 was the main source for carbon, and argon was used as the carrier gas. CNTs were synthesized from carbon atoms obtained from catalytic thermal decompo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47033314126487588564 |