Fault Detection and Classification of PECVD Equipment Using Neural Network
碩士 === 中原大學 === 機械工程研究所 === 97 === Currently, the thin film processes are the major process in the TFT industry. Among all the thin film processes, the chemical vapor deposition process, or CVD, is especially important for processing nonmetallic thin films. Although, over the years, different CVDs a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84962085151394276005 |