The Analysis of Measurement System for Semiconductor Foundry by Using MSA-A Case Study of P Company
碩士 === 中原大學 === 工業與系統工程研究所 === 97 === Abstract Since the semiconductor industry has entered an era of nanometer, specifications of related process are required to be exactly accurate. In order to move overall technology of semiconductor process to the next generation to reduce the cost and increase...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67536490763370094635 |