GaN Lattice Matched ZnO Film as GateDielectric Oxide Layer for AlGaN/GaN Switch Application

碩士 === 長庚大學 === 電子工程學研究所 === 97 === Zn films replacement materials have been demonstrated as the gate dielectric materials in AlGaN/GaN HEMT. The dielectric constant of and ZnO are about 8.17 which provide a high channel control ability in FET.In this study. It exhibits prolonged turn-on voltage and...

Full description

Bibliographic Details
Main Authors: Ming Yang Chen, 陳明揚
Other Authors: H. C. Chiu
Format: Others
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/95079568655685928478