Visual Aid Piezoelectric-Actuated Stage of H∞/QFT Combined Design
碩士 === 國立中正大學 === 機械工程所 === 97 === A three-axis nano-positioning device is designed in the lab which consists of an X-Y table and a rotational stage on the top of the X-Y table. Each stage is actuated by a piezoactuator and the motion is sensed by laser displacement sensors and CCD camera. The dynam...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32416941704663137694 |