Studies on multilayered CrN/SixNy thin films sputtered by a pulsed DC magnetron sputting system
碩士 === 東南技術學院 === 機電整合研究所 === 96 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95370988467563617541 |