| Summary: | 碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 96 === In this research, three materials (parylene, PDMS and glass) surface modification with three gases (CF4. SF6 and O2) plasma was presented. The lightly hydrophilic parylene can be transferred to hydrophobic parylene by CF4 and SF6 plasmas, whereas the hydrophobic PDMS was transferred to lightly hydrophilic PDMS by CF4 and SF6 plasmas. Moreover, the CF4 and SF6 plasmas can’t affect the hydrophilic property of glass (SiO2). On the contrary, the O2 plasma can transfer three materials to great hydrophilic parylene. In future, the three modified materials can be used in more other applications, for examples of self-cleaning and suction of fluids.
Our research also successfully transported droplet by arrowed micro-structured surface ratchets with hydrophobic parylene or HMDS. The droplets would be transported more easily after the hydrophobic degree of surface ratchets was increased by hydrophobic parylene. The droplet can be up or back transported by advancing or recessive arrowed surface ratchets, and the average velocity is around 20 mm/sec. Discussion about design of the arrowed surface ratchets was also obtained by mathematical model of surface energy. It was proved that the parylene surface modification was using to the application of droplet transport.
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