Plasma Surface Modification of Parylene Using to Liquid Transport
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 96 === In this research, three materials (parylene, PDMS and glass) surface modification with three gases (CF4. SF6 and O2) plasma was presented. The lightly hydrophilic parylene can be transferred to hydrophobic parylene by CF4 and SF6 plasmas, whereas the hydrophob...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/64831269998965885976 |