The Study of Growing CNTs with Specific Structure and Performance using the Remote-Controlled Intelligent MPCVD System
碩士 === 國立臺北科技大學 === 機電整合研究所 === 96 === In order to improve the reproducibility of CNTs process, this study integrates the industrial technology and remote intelligent control method into microwave plasma chemical vapor deposition (MPCVD) system. An automatic fuzzy control scheme is used to adjust el...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/j927cb |