Design and Fabrication of Capacitive Accelerometer and Microphone using CMOS-MEMS Process
碩士 === 國立臺北科技大學 === 機電整合研究所 === 96 === CMOS-MEMS is composed of CMOS process from IC fabrication and MEMS. The elements based on CMOS-MEMS have the mechanical properties. Therefore, using CMOS-MEMS process for MEMS elements not only has the advantages of MEMS but also has the compatibility with IC f...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qt38cb |