Fabrication and Characterization of p-GaN/Transparent Conducting Oxides Ultraviolet Photodetectors
碩士 === 南台科技大學 === 光電工程系 === 96 === In this study, indium tin oxide(Ni-ITO)、zinc oxide(ZnO)、Aluminum-doped zinc oxide(AzO) films were deposited on double-polished sapphire by magnetron sputtering. After the deposition, the thin films were then thermally annealed(Furnace and RTA) in nitrogen ambient t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13889785989627039654 |