Fracture analysis of ITO thin films
碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 96 === With outstanding performance, thin films have been widely used in broad applications. However, fracture induced in manufacture or application processes will reduce the performance of thin films. In this work, a 300 nm thinkness ITO thin films is deposited...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32801283639599813724 |