The Fabrication of the Porous SOG Thin Film and Its Application in Photodetectors
碩士 === 國立高雄大學 === 電機工程學系碩士班 === 96 === Porous thin film has been widely applied in high speed device system due to its low k constants and novel optical properties. In this thesis, we demonstrate a SOG process with Sol-Gel method and the fabrication of a MIS device using porous SOG thin film as the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/xp2bk7 |