Low temperature CO2 laser annealing of PZT thin films on stainless steel substrates
碩士 === 國立臺灣科技大學 === 機械工程系 === 96 === In this study, Pb(Zr0.52Ti0.48)O3(PZT) and La0.7Sr0.3MnO3 (LSMO) ferroelectric thin films were coated on stainless steel substrates of planar and micro wire shaped using sol-gel process, spin coating and sputtering technques. The phase structure of the films was...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/78625348073859860358 |