Study on residual sresses within multilayer ZnO pyroelectric sensor
碩士 === 國立臺灣科技大學 === 機械工程系 === 96 === Thin-film ZnO pyroelectric sensors use the pyroelectric effect to convert temperature variation to corresponding electrical signal. The quality of ZnO films is a key factor to determine the responsivity of ZnO pyroelectric sensors, which can be influenced by the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30326150540179951746 |