The Study of Sputter-Deposited CeO2,GDC and Ag-CeO2 Thin Films for Resistive Oxygen Sensors
碩士 === 國立臺灣科技大學 === 材料科技研究所 === 96 === In this thesis, we deposit CeO2,(Gd2O3)x-(CeO2)1-x and Ag- CeO2 thin films on Al2O3 substrate by using magnetron sputtering process, anneal the films, then deposit Pt as electrode to fabricate resistive-type oxygen sensor, analyze its electronal properties, act...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99235907517183812689 |