A Study of the Efficiency from the Semiconductor Factoriesof AOPs Treatment on the Local Scrubber Wastewater
碩士 === 國立臺灣大學 === 環境工程學研究所 === 96 === This study investigates the oxidation of local scrubber (L/S) wastewater from semiconductor manufacture by using ozonation, catalytic ozonation (O3/TiO2/Al2O3), and photo-catalytic ozonation (O3/UV/TiO2/Al2O3). This research result of advanced oxidation processe...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/13467469268826921320 |