The Interconnect Fringing Capacitance Model and Its Applications to the Study of Pull-in Voltage of Micro Devices
碩士 === 國立臺灣大學 === 應用力學研究所 === 96 === This research aims at developing empirical formulas for parallel-plate capacitor precisely, including two- and three-dimensional fringing capacitance effects. The derivation was started from massive numerical simulations of different geometry, and then we can der...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55754710000378302748 |