Technique and Theory of Vibration Assistant Scribing Process on LCD Glass Substrate
碩士 === 國立臺灣大學 === 機械工程學研究所 === 96 === A technique of vibration assisted scribing of LCD glass substrate is developed in this thesis. An additional piezoelectric actuator is implemented on the servo controlled loading mechanism of the scribing machine, and a periodically varying load superposed on th...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/40330214400937000083 |