Characterization of Inversion Tunneling Current for MOS Devices with High-k Gate Dielectrics

碩士 === 國立臺灣大學 === 電子工程學研究所 === 96 === The inversion tunneling current of MOS devices is composed of the generation current due to interface states, the generation-recombination current due to bulk traps, and the diffusion current from back contact. The generation-recombination current due to bulk tr...

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Bibliographic Details
Main Authors: Chih-Hao Chen, 陳志豪
Other Authors: Jenn-Gwo Hwu
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/02153982514864814934