The Electrical Characteristics of the Electric-Field Directed Growth of Silicon Nanowires and Ohmic Contact Formation
碩士 === 國立臺灣大學 === 電子工程學研究所 === 96 === Electric-field-directed growth and self-assembly of undoped and lightly p-type doped silicon nanowires by chemical-vapor deposition via the vapor-liquid-solid (VLS) growth mechanism in a low pressure chemical vapor deposition (LPCVD) system is demonstrated. The...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82700579891688105497 |