Fabrication and Analysis of Low Temperature Poly-Si Thin Film Transistor and Flexible Electronics
博士 === 國立臺灣大學 === 電子工程學研究所 === 96 === A location-controlled lateral growth of polycrystalline silicon grain with underneath SiON heat absorption layer and top metal pads laser reflector fabricated by excimer laser annealing are studied. It is found the maximum lateral growth length of poly-Si can re...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35485870319824230609 |