Study of Zinc Oxide Thin Films Deposited on the Glass Substrate by Atomic Layer Deposition

碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 96 === This thesis presents the investigation of the electrical and optical properties of the ZnO films deposited by atomic layer deposition (ALD) on the glass substrates. The thesis is divided into three topics. The first topic is the deposition of ZnO films as tra...

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Bibliographic Details
Main Authors: Ching-Yi Chiu, 邱瀞儀
Other Authors: Miin-Jang Chen
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/38800068157696820401