The Mechanical Properties of Nanocrystalline Silicon Thin Films and Their Applications on Thin Film Transistors
碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === Silicon thin films with different hydrogen dilution ratios (H2/SiH4) are deposited on glass and polyimide at a substrate temperature of 200
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01854316633696592533 |