Measurements and Analyses of the Electrostatic In-plane Comb-drive Rotational Platforms and 1-D Vertical Electrothermal Actuators
碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === The application range of Micro-Electro-Mechanical Systems (MEMS) technology, including the sensor using in airbag deployment systems for modern automobiles, inkjet-printer cartridges, pressure sensor, micro-gyroscopes, etc.. In recent years, the applications of...
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90351869615106302125 |