Strain Release of InGaN/GaN Quantum Wells through Nano-hole Fabrication and Formation of Metal Particles for Surface Plasmon Study with the Anodic Aluminum Oxide Technique
碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === In this research, we fabricate anodic alumina oxide (AAO) on GaN and InGaN/GaN quantum well (QW) structure. With the AAO technique, we can fabricate a thin aluminum oxide film with nano-pore array on the nitride structure, which is used as a mask to deposit meta...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2008
|
Online Access: | http://ndltd.ncl.edu.tw/handle/64807688490105296426 |