Micro Accelerometers with a Hybrid Piezoresistive/Capacitive Sensing Mechanism
碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === In this paper, we want to introduce a novel micro accelerometer with a hybrid piezoresistive/capacitive sensing technique. In general, micro accelerometer has only one type sensing technique. In this paper, we report, to the best of our knowledge, the first m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68222897420975713910 |