Characteristics of Two-Axis Gimbal-less Scanner with radial vertical combdrive actators
碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === Microelectromechanical System (MEMS) scanners have been extensively studied in recent years due to their compactness and capability of optical beam steering, which can be applied to various applications such as optical fiber communication, biological imaging, an...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/72919174823243252760 |