Control Relevant Issues in Semiconductor Manufacturing: Stability and Disturbance Rejection
博士 === 臺灣大學 === 化學工程學研究所 === 96 === The quality control of integrated circuit (IC) processing is becoming more and more important as the wafer becomes larger and the feature size shrinks. However, an advanced IC fabrication process consists of 300+ steps with scarce and usually difficult quality mea...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08058761730918921801 |