Fabrication of a Large-Area Silicon Plate with Microstructures Using 2D Recombining Techniques

碩士 === 國立臺灣海洋大學 === 機械與機電工程學系 === 96 ===

Bibliographic Details
Main Authors: Chih-Heng Chi, 紀志衡
Other Authors: Chih-Wei Wu
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/17195090042425408657
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spelling ndltd-TW-096NTOU54890442016-04-27T04:11:26Z http://ndltd.ncl.edu.tw/handle/17195090042425408657 Fabrication of a Large-Area Silicon Plate with Microstructures Using 2D Recombining Techniques 二維接合技術應用於具微結構之大面積矽基材製作 Chih-Heng Chi 紀志衡 碩士 國立臺灣海洋大學 機械與機電工程學系 96 Chih-Wei Wu 吳志偉 2008 學位論文 ; thesis 60 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立臺灣海洋大學 === 機械與機電工程學系 === 96 ===
author2 Chih-Wei Wu
author_facet Chih-Wei Wu
Chih-Heng Chi
紀志衡
author Chih-Heng Chi
紀志衡
spellingShingle Chih-Heng Chi
紀志衡
Fabrication of a Large-Area Silicon Plate with Microstructures Using 2D Recombining Techniques
author_sort Chih-Heng Chi
title Fabrication of a Large-Area Silicon Plate with Microstructures Using 2D Recombining Techniques
title_short Fabrication of a Large-Area Silicon Plate with Microstructures Using 2D Recombining Techniques
title_full Fabrication of a Large-Area Silicon Plate with Microstructures Using 2D Recombining Techniques
title_fullStr Fabrication of a Large-Area Silicon Plate with Microstructures Using 2D Recombining Techniques
title_full_unstemmed Fabrication of a Large-Area Silicon Plate with Microstructures Using 2D Recombining Techniques
title_sort fabrication of a large-area silicon plate with microstructures using 2d recombining techniques
publishDate 2008
url http://ndltd.ncl.edu.tw/handle/17195090042425408657
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AT jìzhìhéng fabricationofalargeareasiliconplatewithmicrostructuresusing2drecombiningtechniques
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AT jìzhìhéng èrwéijiēhéjìshùyīngyòngyújùwēijiégòuzhīdàmiànjīxìjīcáizhìzuò
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