Fabrication of a Large-Area Silicon Plate with Microstructures Using 2D Recombining Techniques
碩士 === 國立臺灣海洋大學 === 機械與機電工程學系 === 96 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/17195090042425408657 |