A Study of Pb1.1Zr0.52Ti0.48O3 Thin Film Ultrasonic Sensor Array
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 96 === Topic of this paper is the study of PZT（Pb1.1Zr0.52Ti0.48O3）thin film ultrasonic array devices, and its aim is the development of thin film ultrasonic array devices by using semiconductor manufacturing technology. The research was carried out in two directions:...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/95549005849074436512 |