Characterization and Fabrication of RuO2-Al2O3 Microbolometer Array by MEMS
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 96 === The material investigated in this research, RuO2-Al2O3, has a relatively higher temperature coefficient of resistance, so it has its importance as a thermistor material upon the fabrication of uncooled thermal infrared bolometer. In the fabrication of thermal in...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18879653639364450089 |