Design and Implementation of Laser Interferometry Applied in Precision Motion-Control System
碩士 === 國立臺灣師範大學 === 機電科技研究所 === 96 === This paper proposes a design and implementation of a laser interferometry apply in precision motion-control system, which design and assemble the going on amount of the laser interferometer system and examine the accurate little displacement of sport platform...
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Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/74118182883189327395 |