Design and Implementation of Laser Interferometry Applied in Precision Motion-Control System

碩士 === 國立臺灣師範大學 === 機電科技研究所 === 96 ===   This paper proposes a design and implementation of a laser interferometry apply in precision motion-control system, which design and assemble the going on amount of the laser interferometer system and examine the accurate little displacement of sport platform...

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Bibliographic Details
Main Author: 蘇峻緯
Other Authors: 陳美勇
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/74118182883189327395