Study of optical-thermal interaction of nano structure on Ge2Sb2Te5 phase-change thin film by atomic force microscope

• Main Authors: Chien Lun Hsu, 徐健倫
• Other Authors: Din Ping Tsai
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/14956669161519478767

碩士 === 國立臺灣師範大學 === 光電科技研究所 === 96 === In this study, we use Atomic Force Microscopy to measure the surface topography of nano structure made by Thermal-lithography and dynamic optical disk tester on phase-change material Ge2Sb2Te5 thin film. First, we use Thermal-lithography to make a single line structure on different thickness of phase change thin film. We compare the CCD images and surface topography images to know more about the physical properties of laser interaction on phase change thin film. Then we write over recording marks by Dynamic Optical Disk Tester and it becomes a segmental structure. We can control this repetitive segmental structure by changing writing strategy. As the same, we get the surface topography by atomic force microscopy and count the periods of these structures with different laser writing power. Finally, we measure the smallest line width of single line width is 144nm and the periods of the segmental structure are 141nm.