Study of optical-thermal interaction of nano structure on Ge2Sb2Te5 phase-change thin film by atomic force microscope
碩士 === 國立臺灣師範大學 === 光電科技研究所 === 96 === In this study, we use Atomic Force Microscopy to measure the surface topography of nano structure made by Thermal-lithography and dynamic optical disk tester on phase-change material Ge2Sb2Te5 thin film. First, we use Thermal-lithography to make a single line...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/14956669161519478767 |