The Study of Nano Imprint Technology on Surface Acoustic Wave Device
碩士 === 國立清華大學 === 電子工程研究所 === 96 === The object of this thesis is the fabrication process of SAW device. In order to fabricate low-cost SAW filter, we used a simple RTA-MOCVD system to successively deposit piezoelectric AlN(002) film and aluminum electrodes on sapphire substrate without breaking vac...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54745082152356151844 |