Thermal MEMS Devices Study
博士 === 國立清華大學 === 電子工程研究所 === 96 === The thermal management becomes more significant because of the continuing shrinkage of electronics devices. The thermal MEMs devices are the major topics in the thesis. The thermo-optic and thermo-electro devices are involved. The Mach-Zhender type thermo-optic d...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/81704323426815386376 |