Thermal MEMS Devices Study

博士 === 國立清華大學 === 電子工程研究所 === 96 === The thermal management becomes more significant because of the continuing shrinkage of electronics devices. The thermal MEMs devices are the major topics in the thesis. The thermo-optic and thermo-electro devices are involved. The Mach-Zhender type thermo-optic d...

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Bibliographic Details
Main Authors: Pu-Ru Lin, 林溥如
Other Authors: Fon-Shan Huang
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/81704323426815386376