The Electrical Properties of Lead Zirconate Titanate Ferroelectric Transistors for Non-Volatile Memory Application
博士 === 國立清華大學 === 電子工程研究所 === 96 === In this thesis, the electrical properties of Al/Pb(ZrTi)O3/insulator/Si capacitors and field effect transistors with various surface treatments were studied. The wafers were given a H2O2 pre-treatment before insulator layer deposition and a HCl post-treatment aft...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88062759597945372024 |