Comprehensive Evaluations of Three-Dimensional Electromagnetic Field Simulation Software for Accurate Nanometer Device Modeling
碩士 === 國立清華大學 === 資訊工程學系 === 96 === With the advancement of process technologies, the dimension of BEoL (Back End of the Production Line) interconnect has become smaller and smaller. Therefore, it will reveal many issues and challenges unceasingly that need to be concerned than before. One of them i...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30185265160312263513 |