Microstructures Stiction Testing Using Light Diffraction Method

碩士 === 國立清華大學 === 動力機械工程學系 === 96 ===

Bibliographic Details
Main Authors: Kao-Yu Hsu, 許高毓
Other Authors: Weileun Fang
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/78142251780044219241