Effect of Ti incorporation on the properties of DLC film
碩士 === 國立清華大學 === 材料科學工程學系 === 96 === In this work, Ti-doped diamond like carbon thin films (DLC) were synthesized by two methods. In the first method, Ti was incorporated into DLC by a metal vapor vacuum arc system (MeVVA). In the second method, Ti-doped DLC was synthesized by filtered a cathodic v...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86438926764749404341 |