The Resonance Characteristics of Solidly Mounted Resonators with 1/4 and 1/2 λ Mode Configurations
碩士 === 國立中山大學 === 電機工程學系研究所 === 96 === In this thesis, we emphasized on fabrication and anlysis of 1/4 and 1/2 λ mode solidly mounted resonators. First, the reactive RF magnetron sputter used to deposit the highly c-axis-oriented aluminum nitride (AlN) piezoelectric films under different parameters....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/g3d3n4 |