Preparation of ZnO film on MgAl2O4(111) by metal-organic chemical vapor deposition
碩士 === 國立東華大學 === 材料科學與工程學系 === 96 === In this research, we studied the ZnO film deposited on MgAl2O4 (111) by metal-organic chemical vapor deposition. The chemical etching of MgAl2O4 was performed using H2SO4 and H3PO4 respectively to control the exposure of different surfaces of (111) MgAl2O4. At...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s795jg |