Fabrication of Microlens Arrays with Precise Bases and Their Applications
碩士 === 國立東華大學 === 材料科學與工程學系 === 96 === The goal of this study is to tightly control the feature sizes and geometrical shapes of micro-/nanolens arrays, in order to produce precise, spherical micro-/nanolens arrays. We found that the speed of the thermal reflow of photoresist increases with decreasin...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/13775747457339963018 |