Fabrication and characterization of the
碩士 === 國立彰化師範大學 === 光電科技研究所 === 96 === In this thesis, the micron-scaled toroidal inductors have been fabricated successfully by using standard photolithography in conjunction with a lift-off technique. The toroidal inductors with various size and dielectric layer thickness were designed and fabrica...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/11346703929600812278 |