脈衝磁控濺鍍製備ZnO:Mo薄膜及其表面粗化之研究

碩士 === 國立彰化師範大學 === 機電工程學系 === 96 === The purpose of this discourse was prepared MZO (ZnO:Mo) thin film by PMS (Pulse magnetron sputter), and then we used chemical wet etching to observed the effect of diffuse transmittance and electrical properties. First, changed the content of Mo element by diffe...

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Bibliographic Details
Main Author: 王柏霖
Other Authors: 林義成
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/93597097844438590899