Analysis and Study for the Hanging System of AMHS applied to the new generational Wafer Fabrication

碩士 === 國立彰化師範大學 === 機電工程學系 === 96 === As Asia's Silicon Valley, Taiwan has the highest density of IC fabs in the world. Since Taiwan is located in one of the most active quake zone on Euro-Asia plates, one can never underestimate the effects and threats of earthquakes, however small, to the tra...

Full description

Bibliographic Details
Main Author: 吳青陽
Other Authors: 陳明飛
Format: Others
Language:zh-TW
Published: 2008
Online Access:http://ndltd.ncl.edu.tw/handle/11906695265617547668